| DTL空洞 | ユニット | バルブ開度 | 入口圧力(±0.0 | 出口圧力(±0.01MPa) | 端板流量(L±5%) | 端板HDT流量(L±5%) | 空洞本体(L±5%)60-250 | |||
| DTL1 | D1-1 | 3/10 | 0.86 | 0.22 | 24 | 10 | 180 | |||
| D1-2 | 4/10 | 0.87 | 0.20 | - | - | 180 | ||||
| D1-3 | 4/10 | 0.86 | 0.20 | 24 | 10 | 180 | ||||
| DTL2 | D2-1 | 4/10 | 0.86 | 0.21 | 24 | 10 | 180 | |||
| D2-2 | 4/10 | 0.86 | 0.20 | - | - | 180 | ||||
| D2-3 | 4/10 | 0.87 | 0.22 | 24 | 10 | 180 | ||||
| DTL3 | D3-1 | 3/10 | 0.86 | 0.20 | 24 | 10 | 180 | |||
| D3-2 | 3/10 | 0.86 | 0.21 | - | - | 180 | ||||
| D3-3 | 3/10 | 0.87 | 0.22 | 24 | 10 | 180 | ||||
| SDTL空洞 | ユニット | バルブ開度 | 入口圧力(±0.0 | 出口圧力(±0.01MPa) | 上流端板流量(L | 下流端板流量(L | 上流端板HDT流 | 下流端板HDT流 | 空洞本体流量(L±5%)40-200 | |
| S1-3-5 | S1 | 3/10 | 0.88 | 0.42 | 12 | 12 | 10 | 10 | 115 | |
| S3 | 4/10 | 0.46 | 0.25 | 12 | 12 | - | - | 115 | ||
| S5 | 9/10 | 0.24 | 0.20 | 12 | 12 | - | - | 115 | ||
| S2-4-6 | S2 | 3/10 | 0.85 | 0.52 | 12 | 12 | 10 | 10 | 115 | |
| S4 | 2/10 | 0.56 | 0.32 | 12 | 12 | - | - | 115 | ||
| S6 | 5/10 | 0.33 | 0.20 | 12 | 12 | - | - | 115 | ||
| S7-9-11 | S7 | 3/10 | 0.86 | 0.36 | 12 | 12 | - | - | 115 | |
| S9 | 6/10 | 0.34 | 0.26 | 12 | 12 | - | - | 115 | ||
| S11 | 7/10 | 0.27 | 0.20 | 12 | 12 | - | - | 115 | ||
| S8-10-12 | S8 | 3/10 | 0.88 | 0.37 | 12 | 12 | - | - | 115 | |
| S10 | 5/10 | 0.43 | 0.28 | 12 | 12 | - | - | 115 | ||
| S12 | 7/10 | 0.28 | 0.20 | 12 | 12 | - | - | 115 | ||
| S13-15-17 | S13 | 4/10 | 0.86 | 0.38 | 12 | 12 | - | - | 150 | |
| S15 | 6/10 | 0.36 | 0.28 | 12 | 12 | - | - | 150 | ||
| S17 | 8/10 | 0.28 | 0.21 | 12 | 12 | - | - | 140 | ||
| S14-16-18 | S14 | 4/10 | 0.86 | 0.42 | 12 | 12 | - | - | 150 | |
| S16 | 6/10 | 0.41 | 0.31 | 12 | 12 | - | - | 150 | ||
| S18 | 6/10 | 0.30 | 0.20 | 12 | 12 | - | - | 150 | ||
| S19-21-23 | S19 | 4/10 | 0.86 | 0.43 | 12 | 12 | - | - | 150 | |
| S21 | 6/10 | 0.42 | 0.31 | 12 | 12 | - | - | 150 | ||
| S23 | 6/10 | 0.30 | 0.22 | 12 | 12 | - | - | 150 | ||
| S20-22-24 | S20 | 4/10 | 0.86 | 0.46 | 12 | 12 | - | - | 150 | |
| S22 | 6/10 | 0.44 | 0.34 | 12 | 12 | - | - | 150 | ||
| S24 | 6/10 | 0.33 | 0.20 | 12 | 12 | - | - | 150 | ||
| S25-27-29 | S25 | 4/10 | 0.85 | 0.54 | 12 | 12 | - | - | 150 | |
| S27 | 6/10 | 0.52 | 0.40 | 12 | 12 | - | - | 150 | ||
| S29 | 5/10 | 0.40 | 0.20 | 12 | 12 | - | - | 150 | ||
| S26-28-30 | S26 | 4/10 | 0.85 | 0.56 | 12 | 12 | - | - | 150 | |
| S28 | 5/10 | 0.56 | 0.38 | 12 | 12 | - | - | 150 | ||
| S30 | 5/10 | 0.38 | 0.21 | 12 | 12 | - | - | 150 | ||
| Debuncher1 | S32 | 4/10 | 0.82 | 0.22 | 12 | 12 | - | - | 150 | |
| Debuncher2 | S31 | 4/10 | 0.76 | 0.28 | 12 | 12 | - | - | 150 | |
| 小計 | 528 | 384 | 80 | 20 | 5990 | |||||
| 合計 | 7002 | |||||||||